Print View Posted on: 29 December 2025
In May 2024, two workers at a semiconductor manufacturing company were exposed to radiation while inspecting an X-ray generator(60 kV, 100 mA) used for wafer thickness analysis.The workers were unaware that X-rays were being emitted and, in the process of identifying an malfunction of the device, they removed some components and inserted their hands into the machine to take photographs, during which they were exposed to radiation.The X-ray generator was a cabinet-type device equipped with an interlock system and warning lamp. However, due to a malfunction of the interlock system, radiation continued to be emitted despite the device being disassembled. Additionally, the warning lamp was too dim, making it difficult for the workers to recognize that radiation was being emitted.Both individuals exhibited non-lethal radiation injuries-including erythema, pain, and blistering of the hands. According to the dose assessment results, the equivalent skin doses by both workers exceeded the annual dose limit.